JPH0530870Y2 - - Google Patents
Info
- Publication number
- JPH0530870Y2 JPH0530870Y2 JP19318787U JP19318787U JPH0530870Y2 JP H0530870 Y2 JPH0530870 Y2 JP H0530870Y2 JP 19318787 U JP19318787 U JP 19318787U JP 19318787 U JP19318787 U JP 19318787U JP H0530870 Y2 JPH0530870 Y2 JP H0530870Y2
- Authority
- JP
- Japan
- Prior art keywords
- recess
- base plate
- workpiece
- laser beam
- stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000002952 polymeric resin Substances 0.000 claims description 9
- 229920003002 synthetic resin Polymers 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 4
- 239000000853 adhesive Substances 0.000 claims description 3
- 230000001070 adhesive effect Effects 0.000 claims description 3
- 230000001678 irradiating effect Effects 0.000 claims 1
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 238000005553 drilling Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- -1 Diuracon Polymers 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19318787U JPH0530870Y2 (en]) | 1987-12-18 | 1987-12-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19318787U JPH0530870Y2 (en]) | 1987-12-18 | 1987-12-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0196287U JPH0196287U (en]) | 1989-06-26 |
| JPH0530870Y2 true JPH0530870Y2 (en]) | 1993-08-06 |
Family
ID=31699846
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19318787U Expired - Lifetime JPH0530870Y2 (en]) | 1987-12-18 | 1987-12-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0530870Y2 (en]) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3098398B2 (ja) * | 1995-05-19 | 2000-10-16 | 日本電気株式会社 | ビアホール形成方法及びレーザ光照射装置 |
| JP2009183997A (ja) * | 2008-02-08 | 2009-08-20 | Lintec Corp | ワークの支持体および該支持体を用いたワークの加工方法 |
| JP5408762B2 (ja) * | 2008-02-08 | 2014-02-05 | リンテック株式会社 | レーザーダイシングシートおよびチップ体の製造方法 |
| JP5595021B2 (ja) * | 2009-12-03 | 2014-09-24 | 住友重機械工業株式会社 | レーザ処理装置 |
| JP6226596B2 (ja) * | 2013-07-11 | 2017-11-08 | 東京応化工業株式会社 | 支持体分離装置 |
| JP7630875B2 (ja) * | 2020-11-17 | 2025-02-18 | 株式会社ディスコ | チャックテーブル及びレーザー加工装置 |
-
1987
- 1987-12-18 JP JP19318787U patent/JPH0530870Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0196287U (en]) | 1989-06-26 |
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